Boulder Optical Design Inc.

Dedicated to serve the optics industry

Boulder Optical Design Inc. is dedicated to serving the optics industry with high-level scientific and technical support in optical physics. We are proud to introduce our optical monitor system, which brings high-accuracy thin film processing to a new level.


White light optical monitor

White light passes through the part, and the transmission spectrum is measured. Deposition is stopped when the spectrum matches the theoretical prediction for the end of the layer.

Below is from a coating run using the optical monitor system. Experimental results are shown along with the theoretical transmission from the design. This is a fluorescence edge filter, with blocking OD 4 (1/10,000). The flat transmission level at wavelengths just below the steep edge at 500 nm are particularly sensitive to good layer thickness control. (For a larger image, click on it.)

Image description

It is harder than it sounds. There are three critical parts that make a precision system work well. I am expert in all three:

  • Hardware: For high precision optical monitoring, a good signal makes all the difference. I have enormous experience and skill in optical precision measurements and spectroscopy, especially in precision optics and thin films.
  • Precise material characterization: This is necessary so that the theoretical spectrum matches well with the experimental spectrum. This is my specialty, and it starts with a deep understanding of the interaction of light and matter.
  • Mathematics and software: I have developed software that uses a very sophisticated merit function for predicting the approaching stop time from the measured spectrum.

When we set up an optical monitor system in your chamber, you also get a lot of support and all of this experience.

We also invite you to enjoy this entertaining and educational OM layer endpoint movie, showing the endpoint spectrum and theoretical target spectrum at the end of each layer, for a 51-layer run. The results are from an optical monitor system that I set up.

The cost for an optical monitor system is strongly dependent on the current status of your process development, and the goals that you want to achieve. Please feel free to call and discuss how to set up an optical monitor for your system.